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804309-7
Proceedings of the annual Symposium of the Greater New York Chapter of the AVS on Advances in Microfabrication
Symposium on Advances in Microfabrication
American Vacuum Society. Greater New York Chapter
New York, NY : American Inst. of Physics
11.1980 -
Hauptsacht. 11.1980 - 12.1981: ... of the American Vacuum Society ..
Vorg.: Symposium on High Speed, High Frequency Integrated Circuits: Proceedings of the AVS Symposium on High-Speed, High-Frequency Integrated Circuits
11 in 17,5; 12 in 19,3; 13=21,3 von: Journal of vacuum science & technology (ISSN: 0022-5355)
OCLC-Nr.: 313666318
DDC-Sachgruppen der ZDB: 530 Physik ; 500 Naturwissenschaften
Zeitschrift
Kongressbericht
Vereinigte Staaten, USA, United States
Druckausgabe
014190524
03-09-22