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Methods of measurement for semiconductor materials, process control, and devices : quarterly report / US Department of Commerce, National Bureau of Standards

Washington, DC : US Gov.Print.Off. Nachgewiesen 9.1970,Juli/Sept.(1971) - 20.1973,Apr./Jan.

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ZDB-ID

442599-6  

Title

Methods of measurement for semiconductor materials, process control, and devices : quarterly report / US Department of Commerce, National Bureau of Standards

Published

Washington, DC : US Gov.Print.Off.

Publication history

Nachgewiesen 9.1970,Juli/Sept.(1971) - 20.1973,Apr./Jan.

Former/later titles

Successor:  Semiconductor measurement technology 

Further related titles

9=571; 10=592; 11=598; 12=702; 13=717; 14=727; 15=733; 16=743; 17=754; 18=773; 19=788; 20=806 von:  USA. National Bureau of Standards: National Bureau of Standards technical note  (ISSN: 0083-1913) 

Standard numbers

ISSN: 0090-8541

Subject indexing

DDC subject groups: 620 Engineering & machine engineering 

Manifestation

journal

Country of publication

United States, USA 

Media type

Print

IDN

012538868

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Berlin SBB Haus Unter d.Linden
Link to library information[BER, DE-1]
Holdings
Shelfmark
Ser. 15342-...
Location
Außenmagazin
Holdings
9.1970(1971) - 20.1973
Interlibrary loan
yes, copy and loan