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Proceedings of the Workshop on Refractory Metals and Silicides for VLSI

New York, NY : [Verlag nicht ermittelbar] 3.1985 - 5.1987[?]

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ZDB-ID

57892-7  

Title

Proceedings of the Workshop on Refractory Metals and Silicides for VLSI

Corporate body

Workshop on Refractory Metals and Silicides for VLSI 

Published

New York, NY : [Verlag nicht ermittelbar]

Publication history

3.1985 - 5.1987[?]

Former/later titles

Predecessor:  Workshop on Refractory Metal Silicides for VLSI: Proceedings of the Workshop on Refractory Metal Silicides for VLSI 

Further related titles

3 in 3,6; 4 in 4,6; 5 in 5,6 von:  [Journal of vacuum science and technology / B]  (ISSN: 2166-2746) 

Standard numbers

OCLC number: 310949060

Subject indexing

DDC subject groups: 670 Manufacturing 

Manifestation

journal

Type of publication

Congress report

Country of publication

United States, USA 

Media type

Print

IDN

01051094X

Last Change

03-09-22

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Berlin SBB Haus Potsdamer Str
Link to library information[BER, DE-1a]
Holdings
Shelfmark
Zsn 19051;B- ...
Location
Außenmagazin
Holdings
3.1985 - 5.1987
Interlibrary loan
yes, copy and loan
Bochum UB
Link to library information[NRW, DE-294]
Holdings
Shelfmark
ZSC 297
Location
Zeitschriften
Holdings
3.1985 - 4.1986
[Standort: Witten]
Interlibrary loan
yes, paper copy only
Dresden SLUB, BB Drepunct
Link to library information[SAX, DE-14-09]
Holdings
Shelfmark
19 4 02080
Holdings
3.1985 - 5.1987
[enth. in: Journal of vacuum science & technology / B]
Interlibrary loan
yes, copy and loan
Göttingen SUB
Link to library information[NIE, DE-7]
Holdings
Shelfmark
vorh. in: ZB 57285
Holdings
3.1985
[Enthalten in: Journal of vacuum science & technology / B]
Interlibrary loan
yes, paper copy only