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Proceedings of the Workshop on Refractory Metal Silicides for VLSI / sponsored by the American Vacuum Soc

New York, NY : Amer. Inst. of Physics Nachgewiesen 2.1984

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ZDB-ID

629175-2  

Title

Proceedings of the Workshop on Refractory Metal Silicides for VLSI / sponsored by the American Vacuum Soc

Corporate body

Workshop on Refractory Metal Silicides for VLSI 

Published

New York, NY : Amer. Inst. of Physics

Publication history

Nachgewiesen 2.1984

Former/later titles

Successor:  Workshop on Refractory Metals and Silicides for VLSI: Proceedings of the Workshop on Refractory Metals and Silicides for VLSI 

Successor:  Workshop on Refractory Metals and Silicides for VLSI: Workshop on Refractory Metals and Silicides for VLSI 

Further related titles

2 in 2,4 von:  [Journal of vacuum science and technology / B]  (ISSN: 2166-2746) 

Standard numbers

OCLC number: 183390278

Subject indexing

DDC subject groups: 620 Engineering & machine engineering  ;  530 Physics 

Manifestation

journal

Type of publication

Congress report

Country of publication

United States, USA 

Media type

Print

IDN

013642243

Last Change

03-09-22

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Berlin SBB Haus Potsdamer Str
Link to library information[BER, DE-1a]
Holdings
Shelfmark
Zsn 19051;B- 2,4
Location
Außenmagazin
Holdings
2.1984
Interlibrary loan
yes, copy and loan
Bochum UB
Link to library information[NRW, DE-294]
Holdings
Shelfmark
ZSC 297
Location
Zeitschriften
Holdings
2.1984
[Standort: Witten]
Interlibrary loan
yes, paper copy only
Dresden SLUB, BB Drepunct
Link to library information[SAX, DE-14-09]
Holdings
Shelfmark
19 4 02080
Holdings
2.1984
[enth. in: Journal of vacuum science & technology / B]
Interlibrary loan
yes, copy and loan
Göttingen SUB
Link to library information[NIE, DE-7]
Holdings
Shelfmark
vorh. in: ZB 57285
Holdings
2.1984
[Enthalten in: Journal of vacuum science & technology / B]
Interlibrary loan
yes, paper copy only
Kassel UB, Sto OZW
Link to library information[HES, DE-34-90]
Holdings
Shelfmark
98 ZB 193 B
Holdings
2.1984,San Juan Bautista,Calif.(=2). 3.1985,San Juan Bautistac,Calif.(=3).
[Klammerzaehlung = Zaehlung von "Journal of vacuum science and technology" u. Bestandteil d. Signatur]
Interlibrary loan
yes, paper copy only