629175-2  

Proceedings of the Workshop on Refractory Metal Silicides for VLSI / sponsored by the American Vacuum Soc

Workshop on Refractory Metal Silicides for VLSI 

New York, NY : Amer. Inst. of Physics

Nachgewiesen 2.1984

Forts.:  Workshop on Refractory Metals and Silicides for VLSI: Proceedings of the Workshop on Refractory Metals and Silicides for VLSI 

Forts.:  Workshop on Refractory Metals and Silicides for VLSI: Workshop on Refractory Metals and Silicides for VLSI 

2 in 2,4 von:  [Journal of vacuum science and technology / B]  (ISSN: 2166-2746) 

OCLC-Nr.: 183390278

DDC-Sachgruppen der ZDB: 620 Ingenieurwissenschaften und Maschinenbau  ;  530 Physik 

Zeitschrift

Kongressbericht

Vereinigte Staaten, USA, United States 

Druckausgabe

013642243

03-09-22